The results showed that high dielectric constant and low loss BST film can be fabricated using this method without special anneal process.
使用这种方法不需要专门的退火工艺，就可以制备晶体结构完整的高介电常数BST薄膜。
The interlayer dielectric film formed by the method has a low dielectric constant and shows superior mechanical properties.
由本方法形成的层间电介质膜具有低介电常数并显示出优良的机械特性。
The layer insulation film has various excellent performances such as high heat endurance, high solvent resistance, high transmittance and low dielectric constant.
该层间绝缘膜具有高耐热性、高耐溶剂性、高透光率、低介电常数等各种优良的性能。
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