plasma-based low-energy ion implantation
plasma-based low-energy ion implantation
基于等离子体的低能离子注入
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The surface modification of 316 austenitic stainless steel has been investigated by plasma-based low-energy ion implantation apparatus at various temperatures and working atmospheric pressure.
采用等离子体基低能离子注入装置在不同注入温度、气压条件下氮离子注入316奥氏体不锈钢。
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