冷压印光刻
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room-temperature imprint lithography 冷压印光刻
Aiming at the lost accuracy happened in HEL (hot embossing lithography) because of thermal distortion, room-temperature imprint lithography is proposed.
针对热压印光刻工艺中因热变形而导致精度丧失的问题，提出了冷压印光刻。
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