silicon rich silicon oxide
关键词: 富硅氧化硅; 光致发光; 各向同性; 微盘; 微加工 [gap=826]Key words: silicon rich silicon oxide; photoluminescence; isotropic; microdisk; micro2fabrication ...
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silicon rich silicon oxide
富硅氧化硅
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Analysis by XPS graph obtained silicon atom ratio of oxygen is about 1:1, the results showed that the films were annealed silicon oxide film is rich silicon oxide.
通过对XPS图的分析得到硅氧的原子比大约是1:1,这个结果表明对薄膜进行退火后氧化硅薄膜是富硅氧化物。
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