应用溶胶凝胶方法制备了YSZ薄膜。
介绍了一种功能薄膜微细图形制备新方法—化学修饰溶胶-凝胶法。
A new way called chemically modified sol-gel method for preparing patterned functional films is introduced.
与其它方法相比，溶胶-凝胶法有着极大的优势。
Compared with other methods, the sol-gel method has great advantage.
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