Woods mixed six birdies with two dropped shots and a double-bogey at the par-three fourth.
Hamill would have been even further ahead but for a double-bogey at the sixth hole.
He had three further birdies but found water at the 16th, where he ended with a double-bogey.
Karlsson, chasing his second title in a week, found the trees twice as he ran up a double-bogey six.
Fellow Ryder Cup hopeful Henrik Stenson had a double-bogey five at the second but claimed four birdies for a 70.
Argentine Andres Romero, who led the Open before finishing double-bogey, bogey, led Swede Niclas Fasth by two after 32 holes.
Westwood had three bogeys in his first five holes and then finished with a double-bogey sixth to end on four over.
Garcia fared a lot worse in the incessant downpour, his six-over effort featuring five bogeys and a double-bogey on the par-three 16th.
He then drove into water for a double-bogey six at the 16th and finished in eighth place place after a disappointing 75.
However, he could not maintain his momentum at the turn and shot a 43, including two double-bogey sixes and three other dropped shots.
The double-bogey, foretold two more bogeys and triple-bogey on the back nine, finishing Couples with a 77 and at even par for the tournament.
Perry fell away after a nightmare double-bogey on the par-three 13th.
Fisher scored 34 on his outward nine but bogeys at the 14th and 15th, and a double-bogey on the par-four 17th severely hampered his title bid.
The Scot had an eagle at the 2nd - where he had had a double-bogey the previous day - but immediately dropped a shot at the 3rd.
He reached the turn on two under and shot four more birdies on the way home, but a double-bogey at the 13th denied him a better score.
While Harrington put himself in the mix with two birdies to finish with a 66, Campbell's challenge ended when he found the water on the 18th for a double-bogey six.
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After overcoming a bad start, five over after 10 holes, he settled down and posted seven birdies and an eagle, against only one bogey and one double-bogey, in the remaining 26 holes.
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Phil Mickelson recovered from a double-bogey six at the third hole to also post a 69, leaving him one shot adrift of McDowell and tied for third with compatriot Steve Stricker (69).
"I don't think you can report what I said to myself coming off the first green, " said Owen, who threw away the Bay Hill Invitational with a double-bogey, bogey finish last week.
DiMarco, making his first appearance in a European Tour event outside the majors and world golf championships, hit back from a double-bogey six at the first to keep within one shot of Stenson.
But Harrington, who dropped to four over at one point, fired birdies at 11 and 13 before a bogey at 14 and double-bogey via the water on the long 17th rocked him again.
"There was so much trouble around the green , and the green sloped heavy from the back to the front, so if you hit the ball pin-high it could be a double-bogey very easily, " Casper said.
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But then he bogeyed 14, double-bogeyed 15 (even after laying up short of the lake on the par-five with his second shot) and finished the round with a bogey and a double-bogey for a 76 and one-under-par total.
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Els, who won the US Open in 1994 and 1997 and the Open in 2002, picked up three shots in his first six holes but saw his challenge falter around the turn with a spell of bogey, double-bogey, bogey from the ninth.
Rookie Brendan Steele paid for a double-bogey at 15 and a missed short birdie putt at 18 on Friday as his par 72 left him level with former U.S. Open champion Geoff Ogilvy (72), Rich Beem (70), Kevin Sutherland (70), Charley Hoffman (73), Brandt Snedeker (72), and Kevin Chappell (73).
Lee Westwood fell nine shots behind with a double bogey on the par-3 14th and a bogey on the par-5 17th.
However, Woods had a double bogey six at the fourth and then found further trouble with another double bogey at the par-four seventh to drop back to one under and out of contention.
Phil Mickelson opened his final round with four straight birdies, and he was still in the picture until a three-putt double bogey on the 14th hole.
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