文章提出了三种微光学元件光刻对焦方法,并用它们对北京化学试剂研究所生产的BP-218紫外正型光刻胶的分辨率进行了测试,得到了满意的结果。
The resolution of the BP-218 UV photo resist, which is produced in Beijing Institute of Chemical Reagents, was tested by these methods and a satisfactory result was got.
文章提出了三种微光学元件光刻对焦方法,并用它们对北京化学试剂研究所生产的BP-218紫外正型光刻胶的分辨率进行了测试,得到了满意的结果。
The resolution of the BP-218 UV photo resist, which is produced in Beijing Institute of Chemical Reagents, was tested by these methods and a satisfactory result was got.
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