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  • The copper chemical-mechanical polishing (CMP) which is the key planarization technology for ULSI manufacturing was discussed.

    对用于甚大规模集成电路(ULSI)制造的关键平坦化工艺———铜化学机械抛光(CMP)技术进行了讨论。

    youdao

  • The copper chemical-mechanical polishing (CMP) which is the key planarization technology for ULSI manufacturing was discussed.

    对用于甚大规模集成电路(ULSI)制造的关键平坦化工艺———铜化学机械抛光(CMP)技术进行了讨论。

    youdao

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