In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.
设计了一种具有方形光斑的新型激光直写系统，用双远心投影透镜组获得方形光斑并以逐点光刻模式运行， 改善了衍射图形光刻质量， 提高了系统运行效率。
In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.
设计了一种具有方形光斑的新型激光直写系统，用双远心投影透镜组获得方形光斑并以逐点光刻模式运行， 改善了衍射图形光刻质量， 提高了系统运行效率。
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