The invention belongs to the field of ultra-precision processing of hard and brittle crystal materials and relates to a corroding agent for detecting damage of a surface layer of a sapphire substrate.
本发明属于硬脆晶体材料超精密加工领域,涉及一种用于检测蓝宝石基片表面层损伤的腐蚀剂。
The invention belongs to the field of ultra-precision processing of hard and brittle crystal materials and relates to a corroding agent for detecting damage of a surface layer of a sapphire substrate.
本发明属于硬脆晶体材料超精密加工领域,涉及一种用于检测蓝宝石基片表面层损伤的腐蚀剂。
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