By simulating the temperature of the cryopanel and the relation between the pressure and pumping gas speed of the cryopump, it was verified the vacuum system design was rational.
通过对低温泵的真空度及其抽速与液氦低温板温度的关系进行模拟，验证了真空系统设计的合理性。
By simulating the temperature of the cryopanel and the relation between the pressure and pumping gas speed of the cryopump, it was verified the vacuum system design was rational.
通过对低温泵的真空度及其抽速与液氦低温板温度的关系进行模拟，验证了真空系统设计的合理性。
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