The process was controllable and could be applied to strip the photoresist residual of diffractive optical element fabricated on the thick substrate.
该工艺具有良好的可控性，解决了在厚基片上制作大口径衍射光学元件时残余光刻胶的去除问题。
Diffractive-optical element, scanning optical system, optical scanner, and image forming apparatus.
光学衍射元件，光学扫描系统，光扫描器和图像形成装置。
Diffractive-optical element, scanning optical system, optical scanner, and image forming apparatus.
光学衍射元件，光学扫描系统，光扫描器和图像形成装置。
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