An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.
配置浸没流体约束系统(214)，以便在取下第一工件(208)，并用第二工件代替时，可以将浸没流体(212)保持在该间隙中。
An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.
配置浸没流体约束系统(214)，以便在取下第一工件(208)，并用第二工件代替时，可以将浸没流体(212)保持在该间隙中。
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