A fairly large fractional factorial experiment on epi growth was performed, with spatial measurements of thickness and resistivity.
一串制程因子的实验设计，以晶圆薄膜厚度近九点量测。
A fairly large fractional factorial experiment on epi growth was performed, with spatial measurements of thickness and resistivity.
一串制程因子的实验设计，以晶圆薄膜厚度近九点量测。
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