Ruling with grating ruling engine is still the most important means for the fabrication of master grating. Hence, it is valuable to track the state-of-the-art of the diffraction grating ruling engine.
采用高精度的衍射光栅刻划机刻划依然是制作高质量母光栅最重要的手段，因此，跟踪世界光栅刻划机的最新技术进展具有重要的现实意义。
The main devices of the method include a grating interferometer, which controls the ruling engine motion, and a phase scanning mechanism.
该方法的主要装置包括一个用于控制刻划机运动的光栅干涉仪和一个相位扫描机构。
Make the ruling experiments for VLS grating using the phase scanning method. Analyze the ruling error primarily.
采用相位扫描方法进行了变栅距光栅的刻划实验，并对刻划误差进行了初步的分析。
A manufacturing method for a light splitting grating based on precision ruling and thin film deposition technologies was presented.
给出了采用光栅刻划和镀膜技术相结合研制光盘分束光栅的方法。
Finally, some suggestions are made on how to raise the diffraction efficiency and enlarge the ruling area of the grating in terms of experiment.
最后探讨了如何提高衍射效率，控制闪耀波长及增大刻划面积等问题。
Finally, some suggestions are made on how to raise the diffraction efficiency and enlarge the ruling area of the grating in terms of experiment.
最后探讨了如何提高衍射效率，控制闪耀波长及增大刻划面积等问题。
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