Driven by a brushless servo or stepper motor with a precision ground ball screw, this motorized stage offers high-resolution up to 0.1 micron.

由无刷伺服或带有一个精密的地面滚珠螺杆的步进电机驱动，这种机动化阶段提供达0.1微米的高分辨率。

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Driven by a brushless servo or stepper motor with a precision ground ball screw, this motorized stage offers high-resolution up to 0.1 micron.

由无刷伺服或带有一个精密的地面滚珠螺杆的步进电机驱动，这种机动化阶段提供达0.1微米的高分辨率。

youdao