A small undesired hole in an oxide opaque region of a mask or reticle or in a photoresist layer.

氧化物、掩模或标线的不透明区域，或光刻层中不需要的小孔。

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A small undesired hole in an oxide opaque region of a mask or reticle or in a photoresist layer.

氧化物、掩模或标线的不透明区域，或光刻层中不需要的小孔。

youdao