The research on mechanical properties of MEMS materials is one of MEMS fundamental theoretical research fields.
MEMS材料力学性能研究是MEMS的重要基础理论研究领域之一。
Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal.
研究微材料机械力学性能的测试方法是解决MEMS设计、制造、质量控制与评价的关键环节。
In order to obtain the mechanical properties of MEMS materials, it is necessary to develop a test instrument, which is specially used to measure mechanical properties of MEMS materials.
为了能正确测得MEMS材料的力学性能参数，有必要研制一台MEMS材料力学性能测试仪。
This dissertation aims to solve two key problems on optimizing design of mechanism and driving technique for the development of a test instrument for measuring mechanical properties of MEMS materials.
本文的研究目的是为一种MEMS材料力学性能测试仪的研制解决机构优化设计和驱动技术两大关键问题。
A uniaxial tensile test method for measuring mechanical properties of MEMS thin film materials is presented.
介绍了一种用于MEMS薄膜材料力学特性测试的单轴拉伸试验方法。
A uniaxial tensile test method for measuring mechanical properties of MEMS thin film materials is presented.
介绍了一种用于MEMS薄膜材料力学特性测试的单轴拉伸试验方法。
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