This method can be used in micro vibration measurement of high quality.
这种方法能应用于微振动的精确测量。
A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。
A new laser diode interferometer for micro vibration measurement is proposed. The interferometer can measure micro vibrations of an object in real time.
设计了一种半导体激光干涉测量仪，可以实时测量物体的微小振动。
A new laser diode interferometer for micro vibration measurement is proposed. The interferometer can measure micro vibrations of an object in real time.
设计了一种半导体激光干涉测量仪，可以实时测量物体的微小振动。
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