Monolithic integration technique for optical waveguides and photodetectors with CMOS circuits on silicon is presented in this paper.
文章介绍了硅基光波导、光探测器和CMOS电路的单片集成技术。
Monolithic integration technique for optical waveguides and photodetectors with CMOS circuits on silicon is presented in this paper.
文章介绍了硅基光波导、光探测器和CMOS电路的单片集成技术。
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