On this problem, this study was to make the multi-wavelengths interferometry researches on nanometer scale measurement.
本课题针对这些要求,进行了光学多波长干涉法在纳米测量领域的应用研究。
On this problem, this study was to make the multi-wavelengths interferometry researches on nanometer scale measurement.
本课题针对这些要求,进行了光学多波长干涉法在纳米测量领域的应用研究。
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