A new net-shape cathode sputtering target which has a simple structure and a high sputtering rate was put forward.

设计了一种网状阴极溅射靶，它是由多个空心阴极并列交叉组合而成。

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A new net-shape cathode sputtering target which has a simple structure and a high sputtering rate was put forward.

设计了一种网状阴极溅射靶，它是由多个空心阴极并列交叉组合而成。

youdao