An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本发明亦提供一分析器磁铁以及包括前述磁极的离子布植机，因此实现了一改良一离子布植机中的低能量离子束空间电荷中和的方法。
An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本发明亦提供一分析器磁铁以及包括前述磁极的离子布植机，因此实现了一改良一离子布植机中的低能量离子束空间电荷中和的方法。
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