An alternative current medium frequency pulsed magnetron sputtering cathode power supply was introduced.

本文介绍了一种中频交流脉冲式磁控溅射靶极电源。

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The utility model relates to a semi-circular column magnetic control sputtering cathode, belonging to a sputtering source component of a magnetron sputtering device.

一种半圆柱磁控溅射阴极，属于磁控溅射装置中的溅射源部件。

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The utility model relates to a semi-circular column magnetic control sputtering cathode, belonging to a sputtering source component of a magnetron sputtering device.

一种半圆柱磁控溅射阴极，属于磁控溅射装置中的溅射源部件。

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