The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.
文章评述了影响微电子机械系统（MEMS）成品率和可靠性的粘合力和摩擦力问题。
Finally, the silicon condenser microphone with this anti-stiction structure was fabricated successfully.
最终我们研制成具有防粘结构的硅微电容传声器。
The position and length of cantilever stiction change with static driven voltage, so the voltage displacement characteristic depends on load history.
在静电力作用下，悬臂梁粘连的位置和长度会改变，使得执行器的电压位移特性严重依赖加载历史。
Using the operate data of closed control loops and the relevant theories and technique of identification to identify the existence of the valve stiction in the control loops.
运用控制回路在闭环操作时的数据，采用相关辨识理论与技术，闭环辨识控制回路是否存在迟滞。
The new method can not only detect the existence of stiction, but also identify the process model at the same time, is very suitable for founding the specific reason of oscillation.
这种新方法不仅能够检测迟滞的存在，而且能够同时辨识过程对象的模型，非常适合发现控制回路振荡的具体原因。
The new method can not only detect the existence of stiction, but also identify the process model at the same time, is very suitable for founding the specific reason of oscillation.
这种新方法不仅能够检测迟滞的存在，而且能够同时辨识过程对象的模型，非常适合发现控制回路振荡的具体原因。
应用推荐