Using finite analytic solution we gave the numerical computation of the flow field in CVD reactor with tilted susceptor.
本文用有限分析方法，对带有倾斜基座的CVD反应器内流场进行了数值计算。
Using finite analytic solution we gave the numerical computation of the flow field in CVD reactor with tilted susceptor.
本文用有限分析方法，对带有倾斜基座的CVD反应器内流场进行了数值计算。
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