The sub-electrode is deposited with the vacuum thermal evaporation technique;
利用真空热蒸发的方法在硅基片上制备了波导下电极；
The thin film can be prepared by a plurality of film plating techniques such as high vacuum thermal evaporation, electron beam deposition and sputtering.
该薄膜可采用高真空热蒸发、电子束沉积以及溅射等多种镀膜技术制备。
LaF3 single-layer coatings were prepared by thermal boat evaporation at different deposition rates. Some of these films were annealed in vacuum.
用热舟蒸发方法在不同的沉积速率下制备了LaF3单层膜，并对部分单层膜进行了真空退火。
LaF3 single-layer coatings were prepared by thermal boat evaporation at different deposition rates. Some of these films were annealed in vacuum.
用热舟蒸发方法在不同的沉积速率下制备了LaF3单层膜，并对部分单层膜进行了真空退火。
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