通过改变氧分压强、溅射功率、沉积时间和衬底材料来获得不同相组成的氧化钒薄膜。
The different phase composition of the films has been obtained by changing oxygen partial pressure, sputtering powers, deposition times and materials of substrate.
通过改变氧分压强、溅射功率、沉积时间和衬底材料来获得不同相组成的氧化钒薄膜。
The different phase composition of the films has been obtained by changing oxygen partial pressure, sputtering powers, deposition times and materials of substrate.
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