The results show that the damaged layer of silicon cut by WEDM mainly appears massive impurity elements, remelted and elastic distortion with a high density dislocation.
结果表明：电火花线切割单晶硅损伤层主要由杂质元素重污染层、重熔层和含有高密度位错的弹性畸变层组成；
High density dislocation pile-up lies in the interface of the matrix and the second phase, which induces the sub-structure fining of the matrix.
在基体与析出相的界面上存在高密度位错堆积，从而引起基体金属亚结构细化。
High density dislocation pile-up lies in the interface of the matrix and the second phase, which induces the sub-structure fining of the matrix.
在基体与析出相的界面上存在高密度位错堆积，从而引起基体金属亚结构细化。
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