The optimization of the MEMS fabrication process is analyzed.
分析了MEMS制作工艺的改进。
The kernel problem in virtual MEMS fabrication process is process model.
MEMS加工工艺的核心是工艺模型。
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
In this paper, we introduce some basic conceptions of RF MEMS switch such as the switch parameters, classification, typical fabrication process and design considerations.
本文着重介绍了RFMEMS开关的基本参数、分类以及典型制造工艺和设计时考虑因素等一些基本的概念。
Introduces wafer bonding process, technical requirements, application choice and Interaction for MEMS, and showing MEMS fabrication technology and application prospects.
介绍了晶圆键合工艺、技术要求、应用选择以及对MEMS的作用；展示了MEMS制造技术和应用前景。
The study on fabrication process of a high k capacitive MEMS switch is presented.
介绍了一种电容式MEMS开关的制作工艺。
The MEMS skin composed of a flexible substrate layer, a metal electrode layer and a micro-well-array layer was designed, and two process routes based on MEMS were developed for the skin fabrication.
设计了一种包含柔性基底层、金属电极图案层和微凹坑阵列层的三层式蒙皮结构，提出了两种基于MEMS工艺的制作方法。
Study on designing of sensor device's structures and whole reasonable fabrication process, which are two key issues of uncooled infrared bolometer that based on MEMS technique.
本论文对实现基于MEMS工艺技术的非制冷型红外测辐射热计的两个主要关键内容进行了深入研究，即敏感器件结构的设计和整个制造工艺流程的合理设计。
Furthermore, the process of design and virtual fabrication of a new MEMS device, micropump, verified the system "s expansibility."
进一步用一种全新的器件微流量泵的工艺设计和虚拟加工过程验证了系统的可扩充性。
In the research on MB microsystem based on MEMS technology, the design and fabrication of a MB chip is the key process.
在基于MEMS技术的磁珠微系统的研究中，磁珠操控芯片的设计和制作工艺是其中的关键。
In the research on MB microsystem based on MEMS technology, the design and fabrication of a MB chip is the key process.
在基于MEMS技术的磁珠微系统的研究中，磁珠操控芯片的设计和制作工艺是其中的关键。
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