Nano-particle colloid jet polishing is a new kind of ultra-precision machining technology which has important research and application value in fabricating ultra smooth surface.
针对激光陀螺反射镜常用材料微晶玻璃的加工技术，介绍了一种较为成熟的超光滑表面加工方法—定偏心浸液式抛光。
Effect of surface waviness of ultra-smooth reflector substrates on their reflectivity is discussed.
分析了超光滑反射镜基片的表面波度对反射率的影响。
Double sided polishing process has become a main machining method for silicon wafer finishing process, but it is difficult to get ultra-smooth surface with the very stringent machining conditions.
双面抛光已成为硅晶片的主要后续加工方法，但由于需要严格的加工条件，很难获得理想的超光滑表面。
A novel polishing technique based on the two-dimension vibration of fluid is put forward to obtain ultra-smooth surface without damage.
本文阐述了一种基于流体二维振动的原子级无损伤超光滑表面加工技术。
Machining KDP crystal with an ultra-smooth surface is a key subject in the field of modern ultra-precision machining.
加工超光滑表面的KDP晶体是现代超精密加工技术领域的重点研究课题。
This pneumatic servo load system can satisfy the needs of double-sided polishing machine, which can successfully produce the ultra-smooth and flat surface on both sides of silicon wafer.
结果表明气动伺服加载系统能满足双面抛光的要求，可以加工出双面超平滑的硅片。
This pneumatic servo load system can satisfy the needs of double-sided polishing machine, which can successfully produce the ultra-smooth and flat surface on both sides of silicon wafer.
结果表明气动伺服加载系统能满足双面抛光的要求，可以加工出双面超平滑的硅片。
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