The depth of diffusion junction(Xj)is one of the most important parameters in wafer Fab.
在半导体芯片制造过程中,结深是重要的工艺参数之一。
At present, the proposed method has been applied to the actual wafer fab with better performance.
目前,该方法已在某实际半导体生产线中应用并取得了良好的效果。
Some design principles for rebuilding the special gases system of a wafer fab are described. Engineering regulations for rebuilding the tubing system are discussed in detail.
本文介绍了工艺线特种工艺气体系统改造设计方面的一些原则,并详细论述了管路的施工规程。
Some design principles for rebuilding the special gases system of a wafer fab are described. Engineering regulations for rebuilding the tubing system are discussed in detail.
本文介绍了工艺线特种工艺气体系统改造设计方面的一些原则,并详细论述了管路的施工规程。
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