The method can substitute a wet cleaning method to clean completely the deposition chamber, is easy and rapid to operate, can reduce the idle time of equipment and improve the productivity.
本发明的化学气相沉积室的清洁方法，可以代替湿法清洁方法实现对沉积室的全面清洁，操作方便、快捷，并可减少设备的闲置时间，提高生产效率。
A new low-BTU-fuel gasifier based on high-temperature air combustion is proposed. it is made up of high-temperature air generator, gasifier, heat recovery boiler, and wet type gas cleaning equipment.
介绍一种基于高温低氧空气燃烧的低热值燃料气化炉，其主要部件为高温空气发生器、气化器、余热锅炉和湿式气体净化装置。
A new low-BTU-fuel gasifier based on high-temperature air combustion is proposed. it is made up of high-temperature air generator, gasifier, heat recovery boiler, and wet type gas cleaning equipment.
介绍一种基于高温低氧空气燃烧的低热值燃料气化炉，其主要部件为高温空气发生器、气化器、余热锅炉和湿式气体净化装置。
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