Metallic antimony thin film was deposited by magnetron sputtering and it was investigated as anode materials for lithium-ion batteries.
采用磁控溅射方法制备金属锑薄膜，并把它作为锂离子二次电池负极进行研究。
The present invention relates to a kind of anode plate and its sputtering apparatus.
本发明涉及一种阳极板及一种包括所述阳极板的溅镀装置。
When the anode plate is used in sputtering DLC coating, no wrapping structures are formed in the edges of the substrate and the sputtered coating is firm with less falling off.
利用本发明的阳极板溅镀dlc膜层，在基材表面边缘处不产生包覆结构，膜层不易脱落。
When the anode plate is used in sputtering DLC coating, no wrapping structures are formed in the edges of the substrate and the sputtered coating is firm with less falling off.
利用本发明的阳极板溅镀dlc膜层，在基材表面边缘处不产生包覆结构，膜层不易脱落。
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