The spacial field during large area diamond film deposition was simulated using this model to study the influence of deposited parameters.
利用该模型对沉积大面积金刚石薄膜的空间场进行了模拟计算，研究了沉积参数对空间场的影响。
The spacial field during large area diamond film deposition was simulated using this model to study the influence of deposited parameters.
利用该模型对沉积大面积金刚石薄膜的空间场进行了模拟计算，研究了沉积参数对空间场的影响。
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