本文报道在光解沉积钨膜和光致热分解沉积铂膜中观察到沉积速率随光强饱和现象。
Rate Saturation in laser chemical vapor deposition of W and Pt films by photolysis or pyrolysis with the increase of the light intensity have been observed.
本文报道在光解沉积钨膜和光致热分解沉积铂膜中观察到沉积速率随光强饱和现象。
Rate Saturation in laser chemical vapor deposition of W and Pt films by photolysis or pyrolysis with the increase of the light intensity have been observed.
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