三氯氢硅合成炉

Trichlorosilane synthesis furnace

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1
介绍了治理三氯氢硅合成炉尾气的方法，并进行了比较。
The method of tail gas harness of trichlorosilane synthesis furnace were introduced and compared.
2
分析了三氯氢硅合成炉出口反应气体组分数据存在的问题。
The existing problems of gas data of synthesis furnace exit of trichlorosilane were analysed.
3
前言：介绍了治理三氯氢硅合成炉尾气的方法，并进行了比较。
The method of tail gas harness of trichlorosilane synthesis furnace were introduced and compared.

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