Then the pulsed solid state laser power and mask machining system is designed through simulations and experiments. And the system working theory is also analyzed.

A finite element model for diaphragm air spring is created, and its dynamic characteristics are simulated and verified by test, with both results coinciding each other.

Through the combination of ANSYS simulation and experimental data, the conclusion is drawn that the enhancement of the thin gas film can improve the static bearing capacity of the air bearing.