Variable Angle spectroscopic ellipsometry (VASE) is a instrument for measuring optical film refractive index and thickness and is a powerful technique for research on new materials and processes.
2
用光谱式椭偏仪对薄膜的厚度进行了测试。
The thicknesses of the thin films are measured by spectroscopic ellipsometer.
3
探讨了利用普通光谱型椭偏仪对各向异性液晶层进行综合性测量的可行性。
A simple method using spectroscopic ellipsometry to measure uniaxial liquid crystal layer is introduced.