Presents the principle of this air conditioning system applied to an electronic semiconductor clean plant and the design of its water system.
2
飞兆半导体型号16的真空调节器是专为系统压力控制系统的上方和下方大气压力要求。
The Fairchild Model 16 Vacuum Regulator is designed for systems that require system pressure control above and below atmospheric pressure.
3
飞兆半导体型号1600A的真空调节器是专为系统，这需要高流量和压力控制系统的上方和下方大气压力。
The Fairchild Model 1600A Vacuum Regulator is designed for systems that require High Flow and system pressure control above and below atmospheric pressure.
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