Piezoresistance
...压阻;敏感薄膜;SOI(绝缘体上硅);MEMS(微机电系统) [gap=1106]Keywords: high temperature pressure sensor;piezoresistance;sensitive membrane;SOI(Silicon on Insulator);MEMS(Micro Electro Mechanical Syst..
pressure resistance
pressure resistance压阻 The operating principle and relative application circuit of pressure resistance sensor are presented in this paper.
piezoresistor
piezoresistor压阻 A super-stable structure with quad-beams,which has highly symmetric structure has been designed ,and this help to elimin...