We calculated the natural frequencies and mode of vibration for a five stepped Si-beam of Si-piezoresistive accelerometer.
2
第三章详细阐述了压阻式加速度传感器的制作工艺,包括芯片工艺和盖板工艺。
The structure and dimension of the sensor were designed in this chapter. In chapter 3, the process of sensors is elaborated, the sensing element and cover board .
3
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.