The dynamic characteristics of accelerometers working on gyro free micro inertial measurement units was discussed, with a piezoresistive accelerometer as an example.
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硅微机械加速度计作为一种可以测量加速度的传感器,可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.