Used for engraving glass, cleaning residue on the sand casting, controlled fermentation, power semiconductor wafer polishing and cleaning corrosion (with HNO3 mixed acid).
2
结果表明气动伺服加载系统能满足双面抛光的要求,可以加工出双面超平滑的硅片。
This pneumatic servo load system can satisfy the needs of double-sided polishing machine, which can successfully produce the ultra-smooth and flat surface on both sides of silicon wafer.
3
本文主要介绍在国产双面抛光机上一次同时完成的硅片双面抛光技术。
This article mainly introduces the technique of having both sides of silicon wafers polished simultaneously on the polishing machine made domestically.