Taken into account of the constraint of joint angle, the closed-form workspace equation was given according to its characteristic.
2
经计算机模拟，得到了悬臂摆动角速度与悬臂摆角的关系曲线以及摆动力与悬臂摆角的关系曲线。
Relation curve between angular velocity and waving angular of boom and relation curve between swaying force and waving angular are obtained by computer simulation.
3
研究了基片摆动和基片自转的磁控溅射系统中基片摆动角振幅和基片自转角速度对磁控溅射膜厚均匀性的影响。
The influence of rotation speed and pendulum amplitude on the thickness uniformity of film deposited by radio frequency magnetron sputtering system with rotation and pendulum was researched.
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