氦检漏设备

Helium leak detection equipment

以上为机器翻译结果，快速获取精准的人工翻译结果，建议选择有道人工翻译

1
赛乐真空技术有限责任公司是氦检漏系统和专用设备的制造厂家。
Seiler Vakuumtechnik GmbH is a manufacturer of Helium leak detection systems and special - purpose equipment.
2
本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.

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