An optical method was introduced for measuring the thickness of solid thin films.
2
指出了采用涡流测量薄膜厚度也是一种实用的测量方法。
It is indicated that the thin film thickness measurement by eddy is also a practical method.
3
前言: 对用电子显微镜测量薄膜厚度的三种方法:双束衍射法、污斑法、污线法进行了实验及比较分析。
The experiments , comparison and analysis for the three thickness measurement methods :two-beam diffraction method , contamination spot method and contamination line method were carried out.