Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
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本文介绍了加速度传感器热灵敏度漂移的动态测试系统组成和测试方法,分析了影响测试结果的主要因素。
This paper describes the thermal sensitivity drift dynamic test system form and the measures of the accelerometer, analyzes the main factor influencing the test result.
The thermal shifts of both zero output and sensitivity of the pressure sensor are eliminated by the compensation With two bridges. A theoretical analysis and experiment are presented in this paper.