The integration technology of the heater and piezoresistor on one ultrathin cantilever has been finally completed.

Besides rectangular shaped cantilevers with both piezoresistive sensor and electric heater, the "V" and "U" type cantilevers are also formed for electric-heating probes.

Increment motion control system refers to microsecond even nanosecond electronic apparatus switch transient process, millisecond digital controller adjust process and second motor transition process.