This paper presents the technical characteristics, key technologies and the manufacture processes of MEMS, Its applications in spacecraft are also addressed.
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目前,微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.